Inventor
PAPE ERIC A
US25 patents
Patents
25 patentsUS10340171B2Jul 2, 2019
Permanent secondary erosion containment for electrostatic chuck bonds
LAM RES CORP7 citations83
US10049948B2Aug 14, 2018
Power switching system for ESC with array of thermal control elements
LAM RES CORP14 citations83
US9779974B2Oct 3, 2017
System and method for reducing temperature transition in an electrostatic chuck
LAM RES CORP6 citations82
US11430688B2Aug 30, 2022
Two-stage pin lifter for de-chuck operations
LAM RES CORP6 citations73
US10707110B2Jul 7, 2020
Matched TCR joule heater designs for electrostatic chucks
LAM RES CORP3 citations72
US10096506B2Oct 9, 2018
Reducing temperature transition in a substrate support
LAM RES CORP2 citations71
US10690414B2Jun 23, 2020
Multi-plane heater for semiconductor substrate support
LAM RES CORP5 citations70
US10381248B2Aug 13, 2019
Auto-correction of electrostatic chuck temperature non-uniformity
LAM RES CORP2 citations70
US9716022B2Jul 25, 2017
Method of determining thermal stability of a substrate support assembly
LAM RES CORP2 citations70
US12020960B2Jun 25, 2024
Determining and controlling substrate temperature during substrate processing
LAM RES CORP2 citations63
US12387964B2Aug 12, 2025
Matched tcr joule heater designs for electrostatic chucks
LAM RES CORP0 citations62
US12074049B2Aug 27, 2024
Permanent secondary erosion containment for electrostatic chuck bonds
LAM RES CORP0 citations62
US11133211B2Sep 28, 2021
Ceramic baseplate with channels having non-square corners
LAM RES CORP0 citations62
US10770363B2Sep 8, 2020
Power switching system for ESC with array of thermal control elements
LAM RES CORP1 citations62
US9922855B2Mar 20, 2018
Method for reducing temperature transition in an electrostatic chuck
LAM RES CORP1 citations61
US9435692B2Sep 6, 2016
Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output
LAM RES CORP2 citations60
US11384430B2Jul 12, 2022
Method for conditioning a ceramic coating
LAM RES CORP0 citations58
US10522377B2Dec 31, 2019
System and method for substrate support feed-forward temperature control based on RF power
LAM RES CORP1 citations58
US11791189B2Oct 17, 2023
Reflectometer to monitor substrate movement
LAM RES CORP0 citations56
US12249490B2Mar 11, 2025
Single crystal metal oxide plasma chamber component
LAM RES CORP0 citations55
US9543171B2Jan 10, 2017
Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element
LAM RES CORP1 citations51
US7907260B2Mar 15, 2011
Collimator arrangements including multiple collimators and implementation methods thereof
LAM RES CORP1 citations51
US10437236B2Oct 8, 2019
Method of determining thermal stability of a substrate support assembly
LAM RES CORP0 citations49
US10667379B2May 26, 2020
Connections between laminated heater and heater voltage inputs
LAM RES CORP0 citations47
US10764966B2Sep 1, 2020
Laminated heater with different heater trace materials
LAM RES CORP0 citations36