Inventor

HOPPE PETER D

US3 patents

Patents

3 patents

US5882165AMar 16, 1999

Multiple chamber integrated process system

APPLIED MATERIALS INC789 citations98

US5292393AMar 8, 1994

Multichamber integrated process system

APPLIED MATERIALS INC386 citations98

US4951601AAug 28, 1990

Multi-chamber integrated process system

APPLIED MATERIALS INC1,271 citations98