Inventor
LIM JONG-KILL
KR6 patents
⚠️ This page may combine multiple inventors who share the name “LIM JONG-KILL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7115840B2Oct 3, 2006
Wafer bake apparatus
SAMSUNG ELECTRONICS CO LTD3 citations61
US6816230B2Nov 9, 2004
Exposure control apparatus in a lithography system and method thereof
SAMSUNG ELECTRONICS CO LTD2 citations57
US7377776B2May 27, 2008
Semiconductor wafer baking apparatus
SAMSUNG ELECTRONICS CO LTD1 citations51
XIA TAI XIN SEMICONDUCTOR QING DAO LTD
3 patentsUS11581187B2Feb 14, 2023
Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the same
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations55
US11779871B2Oct 10, 2023
Exhaust module for wafer baking apparatus and wafer processing system having the same
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations44
US10854484B1Dec 1, 2020
Method and system for managing liquid supply
XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations35