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Inventor
KAWABATA YASUMITSU
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “KAWABATA YASUMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAKAO HIDETAKA
1 patent
US8388409B2
Mar 5, 2013
Substrate polishing apparatus
NAKAO HIDETAKA
9 citations
79
EBARA CORP
1 patent
US9573245B2
Feb 21, 2017
Polishing method
EBARA CORP
0 citations
36