Inventor

KU SHAO-YEN

TW36 patents

⚠️ This page may combine multiple inventors who share the name “KU SHAO-YEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KU SHAO-YEN

TAIWAN SEMICONDUCTOR MFG CO LTD

Method of etching and cleaning wafers

Chemical dispense system with reduced contamination

Mechanisms for cleaning wafer and scrubber

Apparatus and method of removing photoresist layer

Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing

Photoresist removal

Method and system for processing substrate in semiconductor fabrication

Single wafer cleaning tool with H2SO4 recycling

Apparatus and methods for movable megasonic wafer probe

Aqueous cleaning techniques and compositions for use in semiconductor device manufacture

Apparatus to improve internal wafer temperature profile

Semiconductor apparatus and method of removing photoresist layer on substrate

Integrated platform for improved wafer manufacturing quality

Chemical dispense system with reduced contamination

Integrated platform for improved wafer manufacturing quality

Methods for processing substrate in semiconductor fabrication

Photoresist removal

Wafer transport method

Method for forming semiconductor device structure

Method for controlling surface charge on wafer surface in semiconductor fabrication

Wafer cleaning

Mechanisms for wafer cleaning

Cleaning composition and method for semiconductor device fabrication

System and method for an etch process with silicon concentration control

TAIWAN SEMICONDUCTOR MFG

Method of fabricating high-k metal gate devices

Using implantation method to control gate oxide thickness on dual oxide semiconductor devices

Successful and easy method to remove polysilicon film

Method of manufacturing double diffused drains in semiconductor devices

Loading port, system for etching and cleaning wafers and method of use

KU SHAO-YEN

Nitride film wet stripping

Integrated apparatus to assure wafer quality and manufacturability

CHOU CHUN-LI

Aqueous cleaning techniques and compositions for use in semiconductor device manufacturing

Semiconductor device and method of manufacture

CHIEN YING-HSUEH CHANG

Apparatus and methods for movable megasonic wafer probe

YEH MING-HSI

Cleaning process for semiconductor device fabrication

KU SHAO YEN

Methods for transporting wafers between wafer holders and chambers