Inventor
SU TSAI-PAO
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SU TSAI-PAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS9117760B2Aug 25, 2015
Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturing
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations59
US12090527B2Sep 17, 2024
Method and system for processing substrate in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10497557B2Dec 3, 2019
Integrated platform for improved wafer manufacturing quality
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9064807B2Jun 23, 2015
Integrated platform for improved wafer manufacturing quality
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US10780461B2Sep 22, 2020
Methods for processing substrate in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9601360B2Mar 21, 2017
Wafer transport method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45