Inventor
TSAI WEN-CHANG
TW13 patents
⚠️ This page may combine multiple inventors who share the name “TSAI WEN-CHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS9583352B2Feb 28, 2017
Method of etching and cleaning wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US11090696B2Aug 17, 2021
Apparatus and method of removing photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11664235B2May 30, 2023
Photoresist removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10486204B2Nov 26, 2019
Semiconductor apparatus and method of removing photoresist layer on substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10497557B2Dec 3, 2019
Integrated platform for improved wafer manufacturing quality
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9064807B2Jun 23, 2015
Integrated platform for improved wafer manufacturing quality
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
US9805946B2Oct 31, 2017
Photoresist removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9349617B2May 24, 2016
Mechanisms for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations35