P

Inventor

BRINGOLTZ BARAK

IL28 patents
⚠️ This page may combine multiple inventors who share the name “BRINGOLTZ BARAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

19 patents
US9739702B2Aug 22, 2017

Symmetric target design in scatterometry overlay metrology

KLA TENCOR CORP31 citations92
US9958385B2May 1, 2018

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

KLA TENCOR CORP9 citations84
US9784987B2Oct 10, 2017

Apodization for pupil imaging scatterometry

KLA TENCOR CORP5 citations84
US10591406B2Mar 17, 2020

Symmetric target design in scatterometry overlay metrology

KLA TENCOR CORP6 citations82
US9581430B2Feb 28, 2017

Phase characterization of targets

KLA TENCOR CORP15 citations82
US10203200B2Feb 12, 2019

Analyzing root causes of process variation in scatterometry metrology

KLA TENCOR CORP7 citations81
US9851300B1Dec 26, 2017

Decreasing inaccuracy due to non-periodic effects on scatterometric signals

KLA TENCOR CORP12 citations80
US10533940B2Jan 14, 2020

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

KLA TENCOR CORP2 citations73
US9869543B2Jan 16, 2018

Reducing algorithmic inaccuracy in scatterometry overlay metrology

KLA TENCOR CORP4 citations73
US9091650B2Jul 28, 2015

Apodization for pupil imaging scatterometry

KLA TENCOR CORP5 citations73
US10415963B2Sep 17, 2019

Estimating and eliminating inter-cell process variation inaccuracy

KLA TENCOR CORP2 citations72
US10261014B2Apr 16, 2019

Near field metrology

KLA TENCOR CORP2 citations71
US9903711B2Feb 27, 2018

Feed forward of metrology data in a metrology system

KLA TENCOR CORP5 citations71
US9874527B2Jan 23, 2018

Removing process-variation-related inaccuracies from scatterometry measurements

KLA TENCOR CORP3 citations71
US10234280B2Mar 19, 2019

Reflection symmetric scatterometry overlay targets and methods

KLA TENCOR CORP1 citations62
US10126238B2Nov 13, 2018

Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology

KLA TENCOR CORP0 citations52
US9726984B2Aug 8, 2017

Aperture alignment in scatterometry metrology systems

KLA TENCOR CORP0 citations50
US9909982B2Mar 6, 2018

Pupil plane calibration for scatterometry overlay measurement

KLA TENCOR CORP1 citations47
US11862522B2Jan 2, 2024

Accuracy improvements in optical metrology

KLA TENCOR CORP0 citations44

NOVA LTD

7 patents

NOVA MEASURING INSTR LTD

1 patent

KLA CORP

1 patent