Inventor
YANO WATARU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “YANO WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
3 patentsUS12417930B2Sep 16, 2025
Substrate treating method and substrate treating apparatus
SCREEN HOLDINGS CO LTD0 citations57
US10892174B2Jan 12, 2021
Substrate cleaning brush and substrate cleaning apparatus
SCREEN HOLDINGS CO LTD0 citations50
US10821483B2Nov 3, 2020
Substrate treatment apparatus
SCREEN HOLDINGS CO LTD0 citations38