Inventor

YOSHIZUMI ASUKA

JP5 patents

⚠️ This page may combine multiple inventors who share the name “YOSHIZUMI ASUKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

3 patents

US8361234B2Jan 29, 2013

Substrate treatment apparatus

DAINIPPON SCREEN MFG20 citations89

US9548197B2Jan 17, 2017

Substrate treatment method and substrate treatment apparatus

DAINIPPON SCREEN MFG3 citations70

US9508568B2Nov 29, 2016

Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate

DAINIPPON SCREEN MFG0 citations39

SCREEN HOLDINGS CO LTD

1 patent

US10312114B2Jun 4, 2019

Substrate processing method, and substrate processing device

SCREEN HOLDINGS CO LTD3 citations70

IZUTA TAKASHI

1 patent

US9362147B2Jun 7, 2016

Substrate treatment method

IZUTA TAKASHI3 citations67