Inventor
GAILLARD FREDERIC-XAVIER
FR15 patents
⚠️ This page may combine multiple inventors who share the name “GAILLARD FREDERIC-XAVIER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
9 patentsUS11049724B2Jun 29, 2021
Method for producing patterns in a substrate
COMMISSARIAT ENERGIE ATOMIQUE2 citations71
US10854494B2Dec 1, 2020
Method for producing an interface intended to assemble temporarily a microelectronic support and a manipulation handle, and temporary assembly interface
COMMISSARIAT ENERGIE ATOMIQUE3 citations71
US7960275B2Jun 14, 2011
Method for manufacturing an interconnection structure with cavities for an integrated circuit
COMMISSARIAT ENERGIE ATOMIQUE6 citations61
US8017025B2Sep 13, 2011
Method for producing air gaps using nanotubes
COMMISSARIAT ENERGIE ATOMIQUE4 citations59
US7846512B2Dec 7, 2010
Method for producing patterns in a polymer layer
COMMISSARIAT ENERGIE ATOMIQUE1 citations50
US8011091B2Sep 6, 2011
Fabrication method of a nanotube-based electric connection having air gaps
COMMISSARIAT ENERGIE ATOMIQUE1 citations49
US10563319B2Feb 18, 2020
Process for electrochemically making at least one porous area of a micro and/or nanoelectronic structure
COMMISSARIAT ENERGIE ATOMIQUE0 citations39
US9379024B2Jun 28, 2016
Method for manufacturing a microelectronic device including depositing identical or different metallic layers on the same wafer
COMMISSARIAT ENERGIE ATOMIQUE0 citations34
US9096427B2Aug 4, 2015
Method for making a suspended part of a microelectronic and/or nanoelectronic structure in a monolithic part of a substrate
COMMISSARIAT ENERGIE ATOMIQUE0 citations32
GAILLARD FREDERIC-XAVIER
3 patentsUS8617908B2Dec 31, 2013
Method for producing a substrate including a step of thinning with stop when a porous zone is detected
GAILLARD FREDERIC-XAVIER4 citations59
US8324073B2Dec 4, 2012
Method for producing an electro-mechanical microsystem
GAILLARD FREDERIC-XAVIER0 citations49
US8545932B2Oct 1, 2013
Metallization of a porous silicon zone by in situ reduction and application to a fuel cell
GAILLARD FREDERIC-XAVIER0 citations48