Inventor
CHUN SEUNG JU
KR4 patents
Patents
4 patentsUS10249577B2Apr 2, 2019
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method
ASM IP HOLDING BV414 citations98
US10134757B2Nov 20, 2018
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV449 citations98
US10622375B2Apr 14, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV9 citations83
US10644025B2May 5, 2020
Method of processing a substrate and a device manufactured by using the method
ASM IP HOLDING BV2 citations72