Inventor

OMICHI TAKASHI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “OMICHI TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

1 patent

US5827110AOct 27, 1998

Polishing facility

TOSHIBA KK64 citations94

EBARA CORP

1 patent

US7708618B2May 4, 2010

Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device

EBARA CORP0 citations50