Inventor
MCMILLEN JAMES A
US2 patents
Patents
2 patentsUS6900894B2May 31, 2005
Apparatus and method for measuring dose and energy of ion implantation by employing reflective optics
PROCESS DIAGNOSTICS INC18 citations77
US6900900B2May 31, 2005
Apparatus and method for enabling high resolution film thickness and thickness-uniformity measurements
PROCESS DIAGNOSTICS INC5 citations55