Inventor

PARK JAE OK

KR3 patents

Patents

3 patents

US9209063B2Dec 8, 2015

Apparatus for transferring substrates

TES CO LTD0 citations46

US9209064B2Dec 8, 2015

Apparatus for transferring substrates

TES CO LTD0 citations46

US9142442B2Sep 22, 2015

Apparatus for transferring substrates

TES CO LTD0 citations46