Inventor
BRODINE JEFFREY
US4 patents
Patents
4 patentsUS9425076B2Aug 23, 2016
Substrate transfer robot end effector
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Compliant robot blade for defect reduction
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US11348823B2May 31, 2022
Compliant robot blade for substrate support and transfer
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US11047039B2Jun 29, 2021
Substrate carrier having hard mask
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