Inventor
JONKERS JEROEN
DE25 patents
⚠️ This page may combine multiple inventors who share the name “JONKERS JEROEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS7088424B2Aug 8, 2006
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
ASML NETHERLANDS BV18 citations92
US6859259B2Feb 22, 2005
Lithographic projection apparatus and reflector assembly for use therein
ASML NETHERLANDS BV29 citations92
US7315346B2Jan 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations90
US7026629B2Apr 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations88
US7852460B2Dec 14, 2010
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
ASML NETHERLANDS BV4 citations62
US6987275B2Jan 17, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations62
US7671965B2Mar 2, 2010
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations61
US7170586B2Jan 30, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US7030963B2Apr 18, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US6714279B2Mar 30, 2004
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV1 citations51
KONINKL PHILIPS ELECTRONICS NV
7 patentsUS6683936B2Jan 27, 2004
EUV-transparent interface structure
KONINKL PHILIPS ELECTRONICS NV51 citations92
US7427766B2Sep 23, 2008
Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation
KONINKL PHILIPS ELECTRONICS NV31 citations90
US7518300B2Apr 14, 2009
Method and device for the generation of a plasma through electric discharge in a discharge space
KONINKL PHILIPS ELECTRONICS NV5 citations62
US8040030B2Oct 18, 2011
Method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus
KONINKL PHILIPS ELECTRONICS NV2 citations60
US7397190B2Jul 8, 2008
Gas discharge lamp for extreme UV radiation
KONINKL PHILIPS ELECTRONICS NV5 citations60
US7897948B2Mar 1, 2011
EUV plasma discharge lamp with conveyor belt electrodes
KONINKL PHILIPS ELECTRONICS NV6 citations59
US7688948B2Mar 30, 2010
Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology
KONINKL PHILIPS ELECTRONICS NV0 citations49
JONKERS JEROEN
2 patentsUS8173975B2May 8, 2012
Method and device for removing particles generated by means of a radiation source during generation of short-wave radiation
JONKERS JEROEN6 citations71
US8253123B2Aug 28, 2012
Method and device for generating EUV radiation or soft X-rays with enhanced efficiency
JONKERS JEROEN6 citations59