Inventor
JAUERNIG ALEXANDRA
DE4 patents
Patents
4 patentsUS6787047B1Sep 7, 2004
Methods for manufacturing a microstructured sensor
BOSCH GMBH ROBERT30 citations91
US6131880AOct 17, 2000
Microvalve and method for manufacturing a microvalve
BOSCH GMBH ROBERT27 citations91
US5924674AJul 20, 1999
Microvalve and method for manufacturing a microvalve
BOSCH GMBH ROBERT27 citations91
US6174416B1Jan 16, 2001
Micromechanical component production method
BOSCH GMBH ROBERT6 citations58