Inventor

MUKAI KEVIN

US2 patents

Patents

2 patents

US7638161B2Dec 29, 2009

Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption

APPLIED MATERIALS INC7 citations68

US6511924B2Jan 28, 2003

Method of forming a silicon oxide layer on a substrate

APPLIED MATERIALS INC5 citations58