Inventor
OGAWA SHIZUO
JP3 patents
Patents
3 patentsUS5980591ANov 9, 1999
System for processing a plurality of objects contained in a plurality of cassettes
TOKYO ELECTRON LTD56 citations95
US5803932ASep 8, 1998
Resist processing apparatus having an interface section including two stacked substrate waiting tables
TOKYO ELECTRON LTD84 citations95
US6673155B2Jan 6, 2004
Apparatus for forming coating film and apparatus for curing the coating film
TOKYO ELECTRON LTD16 citations83