Inventor
OH SANG GUEN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “OH SANG GUEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS5744812AApr 28, 1998
Faraday cup assembly for a semiconductor ion-implanting apparatus
SAMSUNG ELECTRONICS CO LTD17 citations81
US5731592AMar 24, 1998
Exhaust system for an ion implanter
SAMSUNG ELECTRONICS CO LTD6 citations59
US5945682AAug 31, 1999
Space-saving ion-implantation system installed both in and adjacent to a semiconductor manufacturing line
SAMSUNG ELECTRONICS CO LTD4 citations57
US5856676AJan 5, 1999
Water-removing exhaust system for an ion implanter and a method for using the same
SAMSUNG ELECTRONICS CO LTD4 citations57
US5977553ANov 2, 1999
Mechanism for preventing metallic ion contamination of a wafer in ion implantation equipment
SAMSUNG ELECTRONICS CO LTD4 citations53