Inventor
TRENTELMAN MARK
NL4 patents
Patents
4 patentsUS7432517B2Oct 7, 2008
Pulse modifier, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV43 citations89
US7924406B2Apr 12, 2011
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
ASML NETHERLANDS BV3 citations60
US7868999B2Jan 11, 2011
Lithographic apparatus, source, source controller and control method
ASML NETHERLANDS BV3 citations59
US7671968B2Mar 2, 2010
Lithographic apparatus having masking parts and device manufacturing method
ASML NETHERLANDS BV1 citations50