Inventor

RABE RODOLFO

DE2 patents

Patents

2 patents

US9410662B2Aug 9, 2016

Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus

ZEISS CARL SMT GMBH3 citations69

US9448384B2Sep 20, 2016

Arrangement for mounting an optical element

ZEISS CARL SMT GMBH3 citations67