Inventor
FLÖTGEN CHRISTOPH
AT4 patents
Patents
4 patentsUS8975158B2Mar 10, 2015
Method for permanently bonding wafers
PLACH THOMAS7 citations80
US9252042B2Feb 2, 2016
Method for permanent bonding of wafers
PLACH THOMAS2 citations59
US9159717B2Oct 13, 2015
Method for permanently bonding wafers
PLACH THOMAS3 citations59
US10825793B2Nov 3, 2020
Method for permanently bonding wafers
PLACH THOMAS0 citations38