Inventor

KOSEKI SHINICHI

US4 patents

⚠️ This page may combine multiple inventors who share the name “KOSEKI SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US9425058B2Aug 23, 2016

Simplified litho-etch-litho-etch process

APPLIED MATERIALS INC145 citations95

US11373877B2Jun 28, 2022

Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching

APPLIED MATERIALS INC1 citations58

US12046522B2Jul 23, 2024

Endpoint detection in low open area and/or high aspect ratio etch applications

APPLIED MATERIALS INC0 citations54

KIM HUN SANG

1 patent

US8293656B2Oct 23, 2012

Selective self-aligned double patterning of regions in an integrated circuit device

KIM HUN SANG8 citations73