Inventor
STOLZ MANFRED
3 patents
Patents
3 patentsUS4608271AAug 26, 1986
Method for the manufacture of metal silicide layers by means of reduced pressure gas phase deposition
SIEMENS AG36 citations89
US4258658AMar 31, 1981
CVD Coating device for small parts
SIEMENS AG20 citations79
US4294871AOct 13, 1981
Method for depositing a layer on the inside of cavities of a work piece
SIEMENS AG19 citations71