Inventor

BETZ HANS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “BETZ HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEYBOLD AG

1 patent

US4885070ADec 5, 1989

Method and apparatus for the application of materials

LEYBOLD AG56 citations93

FRAUNHOFER GES FORSCHUNG

1 patent

US4838694AJun 13, 1989

Process for imaging laserinterferometry and a laserinterferometer for carrying out said process

FRAUNHOFER GES FORSCHUNG24 citations86

KERNFORSCHUNGSZ KARLSRUHE

1 patent

US4493753AJan 15, 1985

Method for producing separating nozzle elements for the separation of fluid mixtures

KERNFORSCHUNGSZ KARLSRUHE22 citations78

SIEMENS AG

1 patent

US4856037AAug 8, 1989

Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment

SIEMENS AG11 citations65