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Inventor
KOETZ KIRBY F
US
3 patents
Patents
3 patents
US6140703A
Oct 31, 2000
Semiconductor metallization structure
MOTOROLA INC
33 citations
87
US5851920A
Dec 22, 1998
Method of fabrication of metallization system
MOTOROLA INC
11 citations
70
US5372612A
Dec 13, 1994
Semiconductor material contacting member
MOTOROLA INC
10 citations
65