Inventor
MITSUBORI MASUMI
JP2 patents
Patents
2 patentsUS8358144B2Jan 22, 2013
Method for manufacturing semiconductor device, semiconductor inspection device, and program including color imaging of metal silicide
SEMICONDUCTOR ENERGY LAB2 citations59
US7842520B2Nov 30, 2010
Method for manufacturing semiconductor device, semiconductor inspection device, and program including color imaging of metal silicide and calculations thereof
SEMICONDUCTOR ENERGY LAB2 citations59