Inventor

KALT SAMUEL

DE3 patents

⚠️ This page may combine multiple inventors who share the name “KALT SAMUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US5935739AAug 10, 1999

Manufacturing method for membrane lithography mask with mask fields

IBM19 citations91

US6004700ADec 21, 1999

Membrane mask for electron beam lithography

IBM10 citations70

ZEISS CARL SMT GMBH

1 patent

US8039813B2Oct 18, 2011

Charged particle-optical systems, methods and components

ZEISS CARL SMT GMBH32 citations91