Inventor
CHUN MOON
US11 patents
⚠️ This page may combine multiple inventors who share the name “CHUN MOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEVAC INC
5 patentsUS9303314B2Apr 5, 2016
Ion implant system having grid assembly
INTEVAC INC4 citations83
US9324598B2Apr 26, 2016
Substrate processing system and method
INTEVAC INC7 citations82
US9741894B2Aug 22, 2017
Ion implant system having grid assembly
INTEVAC INC2 citations72
US9875922B2Jan 23, 2018
Substrate processing system and method
INTEVAC INC3 citations71
US10636935B2Apr 28, 2020
Ion implant system having grid assembly
INTEVAC INC0 citations51