Inventor
ROCKFORD LEE
US3 patents
Patents
3 patentsUS6964919B2Nov 15, 2005
Low-k dielectric film with good mechanical strength
INTEL CORP13 citations82
US7145245B2Dec 5, 2006
Low-k dielectric film with good mechanical strength that varies in local porosity depending on location on substrate—therein
INTEL CORP4 citations60
US7579070B2Aug 25, 2009
Multiple layer deposition for improving adhesion
INTEL CORP2 citations56