Inventor

SHIGYOU KOHEI

JP21 patents

⚠️ This page may combine multiple inventors who share the name “SHIGYOU KOHEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHIGYOU KOHEI

FUJIKIN KK

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

Flow control valve for flow controller

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

Valve device and fluid control device

Valve device

Flow path assembly and valve device

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Flow-path forming block and fluid control device provided with flow-path forming block

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Fluid control valve unit

Diaphragm valve and flow rate control device

Diaphragm valve, flow control device, fluid control device, and semiconductor manufacturing device

Diaphragm valve and flow rate control device

Valve device

Fluid control valve unit

Joint member for a fluid controller

Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus

HIROSE TAKASHI

Fluid control device and flow rate control apparatus

Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed

Fluid control device

TOKYO ELECTRON LTD

Gas supply device and semiconductor manufacturing apparatus