Inventor

TSENG CHI-YUN

TW3 patents

⚠️ This page may combine multiple inventors who share the name “TSENG CHI-YUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US6206441B1Mar 27, 2001

Apparatus and method for transferring wafers by robot

TAIWAN SEMICONDUCTOR MFG69 citations88

KU SHAO YEN

1 patent

US9997384B2Jun 12, 2018

Methods for transporting wafers between wafer holders and chambers

KU SHAO YEN2 citations65

CHOU CHUN-LI

1 patent

US9263337B2Feb 16, 2016

Semiconductor device and method of manufacture

CHOU CHUN-LI0 citations32