Inventor
TAKASU YUTAKA
JP4 patents
Patents
4 patentsUS4865445ASep 12, 1989
Apparatus for detecting faults on the surface of a resist master disc and measuring the thickness of the resist coating layer
PIONEER ELECTRONIC CORP47 citations90
US4414604ANov 8, 1983
Heat radiation system for electronic devices
PIONEER ELECTRONIC CORP21 citations80
US5002455AMar 26, 1991
Flow processing system
PIONEER ELECTRONIC CORP14 citations71
US4850791AJul 25, 1989
Flow processing system
PIONEER ELECTRONIC CORP4 citations60