Inventor
OH CHOON-SIK
KR5 patents
⚠️ This page may combine multiple inventors who share the name “OH CHOON-SIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS5084417AJan 28, 1992
Method for selective deposition of refractory metals on silicon substrates and device formed thereby
IBM159 citations98
US5221853AJun 22, 1993
MOSFET with a refractory metal film, a silicide film and a nitride film formed on and in contact with a source, drain and gate region
IBM50 citations92
US5202287AApr 13, 1993
Method for a two step selective deposition of refractory metals utilizing SiH4 reduction and H2 reduction
IBM29 citations92