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Inventor
HIRANUMA MASAYUKI
SG
2 patents
⚠️ This page may combine multiple inventors who share the name “HIRANUMA MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI ULSI SYS CO LTD
1 patent
US6770528B2
Aug 3, 2004
Method of forming a data-storing capacitive element made in an insulating film on a semiconductor substrate
HITACHI ULSI SYS CO LTD
23 citations
90
HITACHI LTD
1 patent
US6444405B1
Sep 3, 2002
Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate
HITACHI LTD
3 citations
60