Inventor

KARI THOMAS S

US2 patents

Patents

2 patents

US6762125B1Jul 13, 2004

Modified facet etch to prevent blown gate oxide and increase etch chamber life

MICRON TECHNOLOGY INC13 citations78

US7262136B2Aug 28, 2007

Modified facet etch to prevent blown gate oxide and increase etch chamber life

MICRON TECHNOLOGY INC2 citations57