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Inventor
GOURGON CECILE
FR
3 patents
⚠️ This page may combine multiple inventors who share the name “GOURGON CECILE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
2 patents
US9123652B2
Sep 1, 2015
Multi-level autolimitating etching method
COMMISSARIAT ENERGIE ATOMIQUE
14 citations
77
US7559758B2
Jul 14, 2009
Mould for nano-printing, process for manufacturing such a mould and use of such a mould
COMMISSARIAT ENERGIE ATOMIQUE
2 citations
58
COMMISSARIEAT A L EN ATOMIQUE
1 patent
US7682515B2
Mar 23, 2010
Nano-imprint lithography method involving substrate pressing
COMMISSARIEAT A L EN ATOMIQUE
3 citations
46