Inventor
THORNES JOSHUA
US3 patents
Patents
3 patentsUS9130337B1Sep 8, 2015
System and method for automatic gas optimization in a two-chamber gas discharge laser system
Cymer LLC16 citations80
US9778108B2Oct 3, 2017
Metrology system and method having a plurality of sensors for estimating a spectral feature of a pulsed light beam
Cymer LLC3 citations66
US9831628B2Nov 28, 2017
System and method for automatic gas optimization in a two-chamber gas discharge laser system
Cymer LLC0 citations48