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Inventor
BORRELLO MICHAEL
US
3 patents
⚠️ This page may combine multiple inventors who share the name “BORRELLO MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
Cymer LLC
2 patents
US9130337B1
Sep 8, 2015
System and method for automatic gas optimization in a two-chamber gas discharge laser system
Cymer LLC
16 citations
80
US9831628B2
Nov 28, 2017
System and method for automatic gas optimization in a two-chamber gas discharge laser system
Cymer LLC
0 citations
48
MALLINCKRODT INC
1 patent
US6557553B1
May 6, 2003
Adaptive inverse control of pressure based ventilation
MALLINCKRODT INC
244 citations
93