Inventor
KOH JAEKANG
KR5 patents
Patents
5 patentsUS11791209B2Oct 17, 2023
Method of manufacturing a semiconductor device using a thermally decomposable layer, a semiconductor manufacturing apparatus, and the semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations70
US11581326B2Feb 14, 2023
Three-dimensional semiconductor memory device
SAMSUNG ELECTRONICS CO LTD1 citations59
US11482453B2Oct 25, 2022
Method of manufacturing a semiconductor device using a thermally decomposable layer, a semiconductor manufacturing apparatus, and the semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations59
US11764119B2Sep 19, 2023
Integrated circuit devices
SAMSUNG ELECTRONICS CO LTD0 citations57
US11264294B2Mar 1, 2022
Integrated circuit devices and manufacturing methods for the same
SAMSUNG ELECTRONICS CO LTD0 citations57