Inventor

AOSHIMA SHOUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AOSHIMA SHOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATSUMURA HIDEKI

2 patents

US6349669B1Feb 26, 2002

Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction

MATSUMURA HIDEKI21 citations90

US6723664B2Apr 20, 2004

Method and apparatus for depositing a thin film, and semiconductor device having a semiconductor-insulator junction

MATSUMURA HIDEKI6 citations71

HIDEKI MATSUMRA

1 patent

US6069094AMay 30, 2000

Method for depositing a thin film

HIDEKI MATSUMRA41 citations92