Inventor
CHEN LIANG-YIN
TW118 patents
Patents
50 patentsUS9564489B2Feb 7, 2017
Multiple gate field-effect transistors having oxygen-scavenged gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD297 citations99
US10347762B1Jul 9, 2019
Field effect transistor contact with reduced contact resistance using implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations94
US11456383B2Sep 27, 2022
Semiconductor device having a contact plug with an air gap spacer
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US11508831B2Nov 22, 2022
Gate spacer structure and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10868142B2Dec 15, 2020
Gate spacer structure and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10658510B2May 19, 2020
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US9824937B1Nov 21, 2017
Flowable CVD quality control in STI loop
TAIWAN SEMICONDUCTOR MFG CO LTD15 citations84
US11289417B2Mar 29, 2022
Semiconductor device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10522656B2Dec 31, 2019
Forming epitaxial structures in fin field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations83
US10763168B2Sep 1, 2020
Semiconductor structure with doped via plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US11978677B2May 7, 2024
Wafer positioning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations75
US11848361B2Dec 19, 2023
Sacrificial layer for semiconductor process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11594618B2Feb 28, 2023
FinFET devices and methods of forming
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11257911B2Feb 22, 2022
Sacrificial layer for semiconductor process
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11257952B2Feb 22, 2022
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11257906B2Feb 22, 2022
High surface dopant concentration formation processes and structures formed thereby
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11227918B2Jan 18, 2022
Melt anneal source and drain regions
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10868178B2Dec 15, 2020
Field effect transistor contact with reduced contact resistance using implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10727226B2Jul 28, 2020
Semiconductor structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10665697B2May 26, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10347720B2Jul 9, 2019
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11488857B2Nov 1, 2022
Semiconductor device and method of manufacture using a contact etch stop layer (CESL) breakthrough process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11211289B2Dec 28, 2021
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11145751B2Oct 12, 2021
Semiconductor structure with doped contact plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US10643892B2May 5, 2020
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9837504B2Dec 5, 2017
Method of modifying capping layer in semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11515206B2Nov 29, 2022
Semiconductor structure with doped via plug
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12557623B2Feb 17, 2026
Semiconductor device with connecting structure having a doped layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12557602B2Feb 17, 2026
Wafer positioning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12501647B2Dec 16, 2025
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12315753B2May 27, 2025
Wafer positioning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12293924B2May 6, 2025
Ion exposure method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12205994B2Jan 21, 2025
Sacrificial layer for semiconductor process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12191174B2Jan 7, 2025
Semiconductor processing tool and method of using an embedded chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12087578B2Sep 10, 2024
Semiconductor structure and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12087847B2Sep 10, 2024
Variable size fin structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12009305B2Jun 11, 2024
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11955553B2Apr 9, 2024
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11915942B2Feb 27, 2024
Ion exposure method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11854853B2Dec 26, 2023
Wafer positioning method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11791204B2Oct 17, 2023
Semiconductor device with connecting structure having a doped layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11652053B2May 16, 2023
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11646377B2May 9, 2023
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US11594636B2Feb 28, 2023
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11393695B1Jul 19, 2022
Ion exposure method and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11380782B2Jul 5, 2022
Variable size fin structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11049972B2Jun 29, 2021
Formation method of semiconductor device with low resistance contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12538567B2Jan 27, 2026
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12527070B2Jan 13, 2026
Method for forming wells for semiconductor devices using implanations of increasing energy
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12513948B2Dec 30, 2025
Forming epitaxial structures in fin field effect transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
Showing the top 50 of 118 patents by PatentIndex Score.