Inventor
YEATES STEPHEN
GB7 patents
⚠️ This page may combine multiple inventors who share the name “YEATES STEPHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV MANCHESTER
6 patentsUS11143961B1Oct 12, 2021
Resist composition
UNIV MANCHESTER2 citations71
US10613441B2Apr 7, 2020
Electron beam resist composition
UNIV MANCHESTER1 citations70
US10599032B2Mar 24, 2020
Secondary electron generating composition
UNIV MANCHESTER2 citations70
US10234764B2Mar 19, 2019
Electron beam resist composition
UNIV MANCHESTER3 citations70
USRE50296EFeb 11, 2025
Electron beam resist composition
UNIV MANCHESTER0 citations60
US11487199B2Nov 1, 2022
Secondary electron generating composition
UNIV MANCHESTER0 citations60