Inventor

WINPENNY RICHARD

GB6 patents

Patents

6 patents

US11143961B1Oct 12, 2021

Resist composition

UNIV MANCHESTER2 citations71

US10613441B2Apr 7, 2020

Electron beam resist composition

UNIV MANCHESTER1 citations70

US10599032B2Mar 24, 2020

Secondary electron generating composition

UNIV MANCHESTER2 citations70

US10234764B2Mar 19, 2019

Electron beam resist composition

UNIV MANCHESTER3 citations70

USRE50296EFeb 11, 2025

Electron beam resist composition

UNIV MANCHESTER0 citations60

US11487199B2Nov 1, 2022

Secondary electron generating composition

UNIV MANCHESTER0 citations60