Inventor
CHANDRASEKAR SIVA
IN5 patents
Patents
5 patentsUS11371148B2Jun 28, 2022
Fabricating a recursive flow gas distribution stack using multiple layers
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USD938373SDec 14, 2021
Substrate transfer structure
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US11515176B2Nov 29, 2022
Thermally controlled lid stack components
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US12557254B2Feb 17, 2026
Two-piece RF shield design
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US12563991B2Feb 24, 2026
Thermal choke plate
APPLIED MATERIALS INC0 citations46