Inventor

FAN YONGFA

US12 patents

⚠️ This page may combine multiple inventors who share the name “FAN YONGFA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SYNOPSYS INC

6 patents

US8918743B1Dec 23, 2014

Edge-based full chip mask topography modeling

SYNOPSYS INC38 citations91

US7954071B2May 31, 2011

Assist feature placement based on a focus-sensitive cost-covariance field

SYNOPSYS INC12 citations81

US8355807B2Jan 15, 2013

Method and apparatus for using aerial image sensitivity to model mask errors

SYNOPSYS INC5 citations71

US8812145B2Aug 19, 2014

Modeling mask errors using aerial image sensitivity

SYNOPSYS INC3 citations61

US8006203B2Aug 23, 2011

Bulk image modeling for optical proximity correction

SYNOPSYS INC6 citations56

US8875066B2Oct 28, 2014

Performing image calculation based on spatial coherence

SYNOPSYS INC0 citations44

ASML NETHERLANDS BV

4 patents

US12468232B2Nov 11, 2025

Etch bias characterization and method of using the same

ASML NETHERLANDS BV0 citations59

US11675274B2Jun 13, 2023

Etch bias characterization and method of using the same

ASML NETHERLANDS BV1 citations59

US12339591B2Jun 24, 2025

Determining metrics for a portion of a pattern on a substrate

ASML NETHERLANDS BV0 citations56

US12505524B2Dec 23, 2025

Method for training or using a process model for determining a pattern in a patterning process

ASML NETHERLANDS BV0 citations48

FAN YONGFA

1 patent

US8161424B2Apr 17, 2012

Method and apparatus for modeling chemically amplified resists

FAN YONGFA2 citations55

BARNES LEVI D

1 patent

US8296688B2Oct 23, 2012

Evaluating the quality of an assist feature placement based on a focus-sensitive cost-covariance field

BARNES LEVI D2 citations54