Inventor
FENG MU
US8 patents
Patents
8 patentsUS12443111B2Oct 14, 2025
Prediction data selection for model calibration to reduce model prediction uncertainty
ASML NETHERLANDS BV1 citations62
US11977336B2May 7, 2024
Method for improving a process for a patterning process
ASML NETHERLANDS BV0 citations61
US12468232B2Nov 11, 2025
Etch bias characterization and method of using the same
ASML NETHERLANDS BV0 citations59
US11675274B2Jun 13, 2023
Etch bias characterization and method of using the same
ASML NETHERLANDS BV1 citations59
US12339591B2Jun 24, 2025
Determining metrics for a portion of a pattern on a substrate
ASML NETHERLANDS BV0 citations56
US11614690B2Mar 28, 2023
Methods of tuning process models
ASML NETHERLANDS BV1 citations55
US11567413B2Jan 31, 2023
Method for determining stochastic variation of printed patterns
ASML NETHERLANDS BV1 citations53
US11314172B2Apr 26, 2022
Instant tuning method for accelerating resist and etch model calibration
ASML NETHERLANDS BV0 citations43