Inventor

JOSEPHINA MOORS JOHANNES HUBERTUS

NL2 patents

⚠️ This page may combine multiple inventors who share the name “JOSEPHINA MOORS JOHANNES HUBERTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

1 patent

US8373846B2Feb 12, 2013

Radiation source, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations60

EHM DIRK HEINRICH

1 patent

US8419862B2Apr 16, 2013

Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor

EHM DIRK HEINRICH4 citations56